2 edition of Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon found in the catalog.
Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon
Union Carbide Corporation.
by Dept. of Energy, for sale by the National Technical Information Service in [Washington], Springfield, Va
Written in English
|Series||DOE/JPL ; 954334-8|
|Contributions||Breneman, W. C., Farrier, E. G., Morihara, Hiroshi., United States. Dept. of Energy.|
|The Physical Object|
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